发布日期：2018-01-03 11:54 浏览次数：
| Inventory Tool List | |||||
| ■1 Equipment(Wafer Process) | |||||
| Tool ID # Tool Model Manufacturer Vintage Wafer Location Description | |||||
| Lithography/ Coater/ Developer | |||||
| 151213-001 | i-line Stepper | FPA-2500i3 | Canon | 1991 | |
| 160508-001 | i-line Stepper | FPA-2500i3 | Canon | ||
| 160802-001 | KrF Scanner | NSR-S204B | Nikon | 2000 | 8" |
| 90916-001 | Mask Aligner | PLA-600FA | Canon | 1991 | 5" |
| 161012-001 | Coater/Developer | SK-80BW-AVPQE | DNS | 2003 | 6"/8" |
| 161012-002 | Developer | SD-80BW-AP | DNS | 2008 | 6"/8" |
| 161123-006 | Coater/Developer | ACT-8 | TEL | 2005 | 8" |
| 150308-001 | UV Cure | UMA-2003-H120F-BK | Ushio | - | 12" |
| 150312-KG1-006 | UV Cure | UMA-802-HC55 | Ushio | 1989 | 6" |
| Etching/Ashing | |||||
| 110604-M-013,014 | Dry Etcher 2sets | P-5000 | AMAT | 1994 | 8" |
| 110504-002 | Dry Etcher | Unity85DM | TEL | 1996 | 8" |
| 150312-KG1-002 | Dry Etcher | U2e-655II | TEL | 1997 | 6" |
| 110210-006 | Dry Etcher 2sets | TE-8500S | TEL | 1994 | 8" |
| 110210-008 | Dry Etcher | TE-8600 | TEL | 1996 | 8" |
| 110907-B-16 | Dry Etcher | TE-8500PE | TEL | 1993 | 8" |
| 150309-K1-158 | Dry Etcher 2sets | TE-5000S | TEL | 1993 | 6" |
| 150309-K1-204 | Dry Etcher | TSE306W | TOK | 1990 | 6" |
| 161123-001 | Dry Etch | Alliance 4720 | Lam Research | 1996 | 8" |
| 161123-002 | Dry Etch | TCE-4802 | TOK | 1996 | 8" |
| 150309-K1-033,42,43,51 | Asher 5sets | MAS-801HR | Canon | 1989 | 6" |
| 150309-K1-186, 187 | Asher 2sets | OPM-A1250 | TOK | 1987 | 6" |
| CVD/PVD/Diffusion/Sputter/Ion Implant | |||||
| Ion Implanter | e220ehp | Varian | 6" | ||
| 170217-001 | PE-CVD | Eagle-10 | ASM | 5" | |
| 170217-002 | Sputter | ILC-1060 | Anelva | 5" | |
| 160422-006 | AP-CVD | WJ TEOS999 | SVG | 5" | |
| 161123-005 | Diffusion Furnace (Alloy) | ALPHA-8 SE-Z | TEL | 2000 | 8" |
| 141006-RM1-015 | Diffusion Furnace | DD-802V-H | Hitachi Kokusai | 1990 | 6" |
| 170217-021 | Diffusion Furnace | IW-6D | TEL | 5" | |
| Wet Station/Wafer Scrubber | |||||
| 150309-K1-061,063 | Jet Scrubber 2 sets | SSW-629B | DNS | 1990 | 6" |
| Metrology, Microscope | |||||
| Tool ID # | Tool | Model | Manufacturer | Vintage | Wafer |
| 161012-004 | Wafer Prober | UF190A |
ACCRETECH (Tokyo Seimitsu) |
2001 | 6" |
| 161106-001 | Surface Scanning Laser Confocal Displacement | LT-9500 | KEYENCE | 2008 | |
| 141006-RM1-247 | Film Thickness | FE-IVD | Rudolph | 1994 | 6" |
| 111112-M-006 | Particle Detector | SFS7600S | KLA-Tencor | 1993 | 8" |
| 160109-001 | SEM | S-3000N | Hitachi | 2003 | - |
| Oven | |||||
| Tool ID # | Tool | Model | Manufacturer | Vintage | Wafer |
| 130711-M031, M032 | Oven | INH-9CD-S | Koyo | ||
